Sacrificial layer process with laser-driven release for batch assembly operations
نویسندگان
چکیده
منابع مشابه
Sacrificial Layer Process with Laser-Driven Release for Batch Assembly Operations - Microelectromechanical Systems, Journal of
A dry sacrificial layer process is presented in which microstructures fabricated on UV-transparent substrates are released by excimer laser ablation of a polymer sacrificial material using laser light incident from the reverse side of the substrate. We investigate the application of this technique to the batch assembly of hybrid microelectromechanical systems (MEMS) built from parts fabricated ...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 1998
ISSN: 1057-7157
DOI: 10.1109/84.735350